Infinitesima - Microscopy Services

We are offering competitive Scanning Probe Microscopy services

Our proprietary, in-house-developed RPM scanners allow for 3D & conductive measurements of sub-nanometer surface features within minutes, faster than conventional AFM techniques & suitable for a wide range of applications

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Our Capability

Field of View: 8×8µm → 0.5×0.5µm @ 1Mpx, configurable
Resolution: horizontal <1nm, vertical <0.1nm
Imaging Speed: 4sec to 16min @ up to 0.2Mpx/s
Automated instrument & stage operation
Comprehensive data analysis solutions
Processing of large data sets
Sample confidentiality
In-person & remote scanning

High speed surface metrology: dynamic mode
High aspect ratio 3D surface profiling: adaptive mode
Surface modification / layer removal for 3D tomography
Conductivity C-AFM a.o. electrical modes

Wafer sizes: 3" / 75mm, 4" / 100mm, 6" / 150mm, 8" / 200mm, 12" / 300mm
Coupons: up to 25 mm
Other sizes possible on request

Cleanroom facility: Class 1,000 / ISO 6
Vacuum chamber: up to 100mm wafers
Ambient: up to 300mm wafers

Wet sample cleaning
Dry sample cleaning: plasma
Sputter coating: C, Ag, Au, Pt, Cr, a.o.

Carbon deposited probes: surface scanning
Diamond probes: surface modification / removal
Conductive probes: electrical measurements
Many other types available

Full suite of standard / advanced software algorithms
Automated analysis of large data sets
Custom analysis tools using: Python, C#, MATLAB, LabVIEW
Data set segmentation and isolated feature analysis

Infinitesima announces first customer shipment of the ground-breaking Metron3D system