We are offering competitive Scanning Probe Microscopy services

Our proprietary, in-house-developed RPM scanners allow for 3D & conductive measurements of sub-nanometer surface features within minutes, faster than conventional AFM techniques & suitable for a wide range of applications

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Our Capability

  • Field of View: 8×8µm → 0.5×0.5µm @ 1Mpx, configurable
  • Resolution: horizontal <1nm, vertical <0.1nm
  • Imaging Speed: 4sec to 16min @ up to 0.2Mpx/s
  • Automated instrument & stage operation
  • Comprehensive data analysis solutions
  • Processing of large data sets
  • Sample confidentiality
  • In-person & remote scanning

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  • High speed surface metrology: dynamic mode
  • High aspect ratio 3D surface profiling: adaptive mode
  • Surface modification / layer removal for 3D tomography
  • Conductivity C-AFM a.o. electrical modes
  • Wafer sizes: 3" / 75mm, 4" / 100mm, 6" / 150mm, 8" / 200mm, 12" / 300mm
  • Coupons: up to 25 mm
  • Other sizes possible on request
  • Cleanroom facility: Class 1,000 / ISO 6
  • Vacuum chamber: up to 100mm wafers
  • Ambient: up to 300mm wafers
  • Wet sample cleaning
  • Dry sample cleaning: plasma
  • Sputter coating: C, Ag, Au, Pt, Cr, a.o.
  • Carbon deposited probes: surface scanning
  • Diamond probes: surface modification / removal
  • Conductive probes: electrical measurements
  • Many other types available
  • Full suite of standard / advanced software algorithms
  • Automated analysis of large data sets
  • Custom analysis tools using: Python, C#, MATLAB, LabVIEW
  • Data set segmentation and isolated feature analysis