Rapid Probe Microscope™

proprietary technology

Rapid Probe Microscope™ (RPM) combines the accuracy and precision of Atomic Force Microscopy with production-ready throughput through a hybrid-optical system of high-speed optical probe actuation and precision interferometry.

Two engineers reviewing equipment beside a laptop in a workshop

The measurement gap

Traditional metrology has reached its limits.

As semiconductor devices continue to shrink and become increasingly complex, manufacturers require richer three-dimensional surface information without sacrificing throughput or damaging the wafer. Atomic force microscopy (AFM) is the only non-destructive technique that provides local 3D metrology.

Front view of industrial module with red cables and cooling fins

Atomic Force Microscopy (AFM)

The fundamental trade-off.

Traditional AFM is an excellent reference technique for local nanoscale topography. It uses an ultra-sharp tip on a flexible cantilever to scan a surface, measuring the forces between tip and sample to build a precise 3D map of its topography.

Imaging speed is limited by the bandwidth of the piezo which actuates the AFM tip to track the surface topography. Its throughput, field of view and probe-related variability limit cost-effective deployment in high-volume semiconductor manufacturing.

Meet RPM