Dec

Joint development program signed with IMEC.

Sep

WW Tech appointed as exclusive Sales and Service representative for Korea

Aug

Scientech appointed as exclusive Sales and Service representative for Taiwan

Mar

View the video VLSI Research interviews CEO Peter Jenkins on Metrology and Inspection

Feb

Joint presentaion with IMEC at SPIE Advanced Lithography conference

The application of a Rapid Probe Microscope RPM) for investigating 1D and 2D structures for EUV lithography. Andrew D. L. Humphris; Alain Moussa; Mirea Dusa; Anne-Laure Charley; Elis Newham; Jenny Goulden; Lei Feng; Christopher Bevis

www.spiedigitallibrary.org/conference-proceedings-of-spie/11325/113251M/The-application-of-a-Rapid-Probe-Microscope-RPM-for-investigating/10.1117/12.2552054.short

A novel high throughput probe microscope: for measuring 3D structures, designed for in-line, integrated or standalone operation. A. D. L. Humphris, L. Fen, M. Tedaldi, L. Mudarikwa, D. Ockwell, J. Goulden

www.spiedigitallibrary.org/conference-proceedings-of-spie/11325/113252H/A-novel-high-throughput-probe-microscope--for-measuring-3D/10.1117/12.2551693.short

Jan

Production version of RPM Generation 6 shipped to Japanese partner for qualification.